JPH071790Y2 - 拡散装置用自動キャップ - Google Patents
拡散装置用自動キャップInfo
- Publication number
- JPH071790Y2 JPH071790Y2 JP1987093892U JP9389287U JPH071790Y2 JP H071790 Y2 JPH071790 Y2 JP H071790Y2 JP 1987093892 U JP1987093892 U JP 1987093892U JP 9389287 U JP9389287 U JP 9389287U JP H071790 Y2 JPH071790 Y2 JP H071790Y2
- Authority
- JP
- Japan
- Prior art keywords
- cap
- reaction tube
- ring
- open end
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 41
- 238000003825 pressing Methods 0.000 claims description 8
- 239000000428 dust Substances 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 239000002516 radical scavenger Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000012494 Quartz wool Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093892U JPH071790Y2 (ja) | 1987-06-17 | 1987-06-17 | 拡散装置用自動キャップ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093892U JPH071790Y2 (ja) | 1987-06-17 | 1987-06-17 | 拡散装置用自動キャップ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201325U JPS63201325U (en]) | 1988-12-26 |
| JPH071790Y2 true JPH071790Y2 (ja) | 1995-01-18 |
Family
ID=30956862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987093892U Expired - Lifetime JPH071790Y2 (ja) | 1987-06-17 | 1987-06-17 | 拡散装置用自動キャップ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071790Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6263407B2 (ja) * | 2014-02-10 | 2018-01-17 | 光洋サーモシステム株式会社 | 熱処理装置 |
| JP6426816B2 (ja) * | 2017-11-20 | 2018-11-21 | 光洋サーモシステム株式会社 | 熱処理装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444542Y2 (en]) * | 1975-06-23 | 1979-12-21 | ||
| JPS58111315A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | 蓋開閉装置 |
| JPS59215722A (ja) * | 1983-05-23 | 1984-12-05 | Toshiba Corp | 半導体製造装置 |
| JPS6042733U (ja) * | 1983-08-26 | 1985-03-26 | 東芝セラミツクス株式会社 | 炉芯管 |
| JPH0220826Y2 (en]) * | 1985-02-15 | 1990-06-06 |
-
1987
- 1987-06-17 JP JP1987093892U patent/JPH071790Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63201325U (en]) | 1988-12-26 |
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